Sensor Manufacturing

ADVACAM's standard offering covers pixel, micro strip and diode sensors fabricated on 6” (150 mm) high resistivity silicon wafers having thickness from 200 µm to 1 mm. Even thinner sensors, down to few micro meter thickness, can be fabricated using a well established carrier wafer technology. In addition, ADVACAM offers Si planar sensor processing on 8" (200 mm) high resistivity wafers for large area sensor components. ADVACAM has specialized in the fabrication of edgeless pixel and microstrip sensors. Edgeless sensors are qualified by having the entire sensor volume sensitive to radiation. The process technology provides inactive regions of less than one micro meter. The edgeless sensors are fabricated on 6” (150 mm) high resistivity silicon wafers with thickness of 50 µm to 675 µm.

Planar Si sensors

Planar Si sensor with any polarities, such as p-on-n, n-on-n, n-on-p and p-on-p can be fabricated. Both p-stop and p-spray technologies are available for the electrical isolation of the anode electrodes. The sensor processes both on 6" and 8" wafers provide low leakage currents and high breakdown voltages that are typically many times higher than the depletion voltage. The processing is carried out with a short delivery time. Advacam provides a possibility to continue the wafer processing by depositing the under bump metallization or solder bumps; carry out the dicing of the wafers and perform the flip chip bonding of the sensor assemblies. We also provide wire bonding of the flip-chip bonded assemblies to the PCB.

Silicon 8" wafers entering into the furnace

Edgeless Si sensors

Edgeless sensors with various sizes are reliably manufactured and further processed. ADVACAM doesn't only provide the edgeless sensor wafer processing service, but also takes the process all the way through the under bump metallization and flip chip bonding steps to deliver edgeless sensor assemblies. Use of edgeless sensor assemblies for large-area tiling can optimize the manufacturing yield. This is a currently a unique offering that only ADVACAM provides.

Planar sensor (left) with wide inactive area around the pixel matrix. The edgeless sensor (right) is fully active to the physical edge of the sensor.