Flip Chip Bonding
The ADVACAM team has been involved in flip chip assembly of hybrid pixel detectors with various pitches and sizes since 2002, allowing for special competences to develop over the years. Today we provide a commercial flip chip service for our customers’ high-value components. In addition to production-oriented work, we also help customers with R&D projects.
Standard flip chip bonding
Most of the flip chip commissions are for bonding CMOS ASICs on silicon sensor modules, but compound semiconductor sensors (GaAs, CdTe & CdZnTe) are increasingly popular. ADVACAM has developed its own wafer bumping and flip chip processes for these sensors, and nowadays they can be routinely flip chip bonded with high success rates. Typical solder structure is such that the solder bumps are deposited on the ASIC readout wafer with the UBM and the sensor wafer has a solderable UBM pads.
SEM image of a cross section of a flip chip bonded Si sensor to the CMOS readout ASIC.
Special flip chip bonding
In special components (e.g. CMOS chips with Cu Through Silicon Vias (TSV)), it is beneficial to deposit the solder bumps on the sensor wafers instead of the very expensive CMOS wafer with TSV’s.
Edgeless sensor flip chip bonded to thin MPX3 TSV ASIC chip